Nanometer Displacement Measurement System | 711
Nanometer Displacement Measurement System | 711
This is a new optical interferometry system that is not limited by the accuracy of the optical elements or the object being measured, based on the fact that the statistics of the scattering field (laser speckle) generated when a rough surface object is irradiated by a laser is completely random in a statistical sense.
| Expected Applications
• Operation analysis of micro mechanical components such as MEMS |
| Features
• High precision measurement – Sub-nanometer order measurement is possible (The measurement system is simply determined by the number of data points used.) |
| Model | NS-1 |
| Laser | Wavelength: 660nm
Maximum output: 90mW Class 3B equivalent |
| Laser beam diameter | Approx. 1.0mm |
| Laser beam interval | Approx. 3.0mm |
| Measurement accuracy | ±1.0nm |
| Measurement range | 0 to 3mm |
| PC & software | Provided as standard accessories |
| Frame rate | 2fps |
| Power supply | Single-phase, AC100V, 50/60Hz, 5A |
| Dimensions | • W240 × D200 × H280mm (Main unit)
• W390 × D320 × H200mm (Control unit) |
| Weight (approx.) | • 5kg (Main unit)
• 6kg (Control unit) |
Contact
-
Inquiries from the web
Contact Form -
Inquiries by telephone